Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias

Applying a DC bias can effectively tune the performance of a piezoelectric ultrasonic micromachined transducer (PMUT) to meet the requirements in multiple application scenarios. However, the effect of DC bias on various parameters of PMUT has not been systematically analyzed and verified. In this wo...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2024-02, Vol.33 (1), p.54-65
Main Authors: Wang, Zekai, Liu, Wenjuan, Hu, Bohao, Xiao, Yuhao, Yang, Chaoxiang, Lu, Liangyu, Cai, Yao, Liu, Yan, Sun, Chengliang
Format: Article
Language:English
Subjects:
Aluminum nitride
Bias
Coupling coefficients
dc bias
Electric fields
Frequency ranges
Mathematical models
Micromachining
Phased arrays
Piezoelectric micromachined ultrasonic transducer (PMUT)
Piezoelectric transducers
Piezoelectricity
Resonant frequencies
Resonant frequency
Scandium
scandium-doped nitride (ScAlN)
theoretical model
Transducers
Ultrasonic transducers
Vibration measurement
Vibrations
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Summary:Applying a DC bias can effectively tune the performance of a piezoelectric ultrasonic micromachined transducer (PMUT) to meet the requirements in multiple application scenarios. However, the effect of DC bias on various parameters of PMUT has not been systematically analyzed and verified. In this work, a theoretical model of scandium-doped aluminum nitride (ScAlN) based PMUT under different DC biases is obtained by extracting new effective coefficients and coupling the DC bias into the vibration functions. The measurement results show that the resonant frequency, center displacement, −3-dB bandwidth, and electromechanical coupling coefficient of ScAlN-based PMUT all change linearly when the DC bias is swept from −90-V to 90-V. Moreover, the sensitivity of resonant frequency is 185-Hz/V, and the effective frequency range is 32.81-kHz. The electromechanical coupling coefficient increased more than 14.18 % at 40-V compared to −40-V. The theoretical model is verified with the experimental measurement and indicates that the performance of ScAlN-based PMUT is tunable through DC bias, which has considerable application potential in application scenarios such as data communication, photoacoustic imaging, pulse-echo positioning, and phased array. [2023-0111]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2023.3323954