A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al 0.72 Sc 0.28 N Lamb Wave Resonators and Filters

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2024-08, Vol.33 (4), p.456-467
Main Authors: Tang, Zichen, Esteves, Giovanni, Yen, Sean, Young, Travis R., David Henry, Michael, Gastian, Loren, Nordquist, Christopher, Olsson, Roy H.
Format: Article
Language:English
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ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2024.3404420