MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding struc...

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Bibliographic Details
Published in:IEEE journal of quantum electronics 2020-02, Vol.56 (1), p.1-10
Main Authors: Quack, Niels, Sattari, Hamed, Takabayashi, Alain Yuji, Zhang, Yu, Verheyen, Peter, Bogaerts, Wim, Edinger, Pierre, Errando-Herranz, Carlos, Gylfason, Kristinn B.
Format: Article
Language:English
Subjects:
Integrated circuits
Integrated optics
Microelectromechanical systems
Micromechanical devices
nanophotonics
Optical attenuators
Optical refraction
Optical waveguides
Photonic integrated circuits
Photonics
Power consumption
Silicon
silicon photonics
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Summary:Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.
ISSN:0018-9197
1558-1713
1558-1713
DOI:10.1109/JQE.2019.2946841