MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding struc...

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Published in:IEEE journal of quantum electronics 2020-02, Vol.56 (1), p.1-10
Main Authors: Quack, Niels, Sattari, Hamed, Takabayashi, Alain Yuji, Zhang, Yu, Verheyen, Peter, Bogaerts, Wim, Edinger, Pierre, Errando-Herranz, Carlos, Gylfason, Kristinn B.
Format: Article
Language:English
Subjects:
Integrated circuits
Integrated optics
Microelectromechanical systems
Micromechanical devices
nanophotonics
Optical attenuators
Optical refraction
Optical waveguides
Photonic integrated circuits
Photonics
Power consumption
Silicon
silicon photonics
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cited_by cdi_FETCH-LOGICAL-c484t-c7d92aa064b4dd844681d1279e72826d65902efbcccd7b60fa9968d481932ebb3
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container_title IEEE journal of quantum electronics
container_volume 56
creator Quack, Niels
Sattari, Hamed
Takabayashi, Alain Yuji
Zhang, Yu
Verheyen, Peter
Bogaerts, Wim
Edinger, Pierre
Errando-Herranz, Carlos
Gylfason, Kristinn B.
description Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.
doi_str_mv 10.1109/JQE.2019.2946841
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source IEEE Xplore (Online service)
subjects Integrated circuits
Integrated optics
Microelectromechanical systems
Micromechanical devices
nanophotonics
Optical attenuators
Optical refraction
Optical waveguides
Photonic integrated circuits
Photonics
Power consumption
Silicon
silicon photonics
title MEMS-Enabled Silicon Photonic Integrated Devices and Circuits
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