CMOS-Based Tactile Microsensor for Medical Instrumentation

This paper presents a novel tactile sensing device aimed at a variety of medical instrumentation applications, including extravascular blood pressure monitoring, distinguishing a coronary artery from a nearby running cardiac vein, and locating the site of a coronary occlusion. The monolithically int...

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Bibliographic Details
Published in:IEEE sensors journal 2007-02, Vol.7 (2), p.258-265
Main Authors: Salo, T., Kirstein, K.-U., Vancura, T., Baltes, H.
Format: Article
Language:English
Subjects:
Arrays
Arteries
Biomedical monitoring
Biomembranes
Blood pressure
Capacitors
CMOS
CMOS process
Instrumentation
Instruments
Medical
Membrane capacitor
Microsensors
Monitoring
Monitors
monolithically integrated
Running
Tactile
tactile sensing
Textile industry
tonometry
Veins
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Summary:This paper presents a novel tactile sensing device aimed at a variety of medical instrumentation applications, including extravascular blood pressure monitoring, distinguishing a coronary artery from a nearby running cardiac vein, and locating the site of a coronary occlusion. The monolithically integrated microsensor is fabricated using an industrial CMOS process with a limited number of postmicromachining steps. Using the tonometric principle, an array of membrane capacitors can detect and monitor the pulsatile pressure variations inside a blood vessel
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2006.886902