Microwave MEMS Antenna Sensor Characterization and Target Detection Using Artificial Neural Networks

This paper demonstrates microwave antenna sensors fabricated on a silicon micro electro-mechanical-system (MEMS) platform. The antennas are designed to operate between 10-16 GHz with 41% bandwidth and 50 Ω input impedance. Each antenna sensor is comprised of two planar metallic four point leaves in...

Full description

Saved in:
Bibliographic Details
Published in:IEEE sensors journal 2014-08, Vol.14 (8), p.2461-2468
Main Authors: Hutchings, Douglas A., El-Shenawee, Magda
Format: Article
Language:English
Subjects:
Antenna measurements
Arrays
artificial neural networks
broadband
Broadband antennas
bulk microfabrication
Coplanar waveguides
dual polarization
Fasteners
MEMS platform
Micromechanical devices
Neural networks
planar antennas
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper demonstrates microwave antenna sensors fabricated on a silicon micro electro-mechanical-system (MEMS) platform. The antennas are designed to operate between 10-16 GHz with 41% bandwidth and 50 Ω input impedance. Each antenna sensor is comprised of two planar metallic four point leaves in horizontal and vertical directions providing dual linear polarization. The design is simulated using the Ansoft high frequency structure simulator. The antennas are fed using coplanar waveguide routed on top of 100 μm width silicon hinges. The fabricated MEMS platform show maximum rotation of 9.14° (total range of 18.28°) around two axes using four torsion hinges. The results highlight the limitation of silicon as hinge material when larger angles are desired. The antenna sensors demonstrate good detection of targets using measured scattered data and the artificial neural networks technique.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2013.2279662