Titanium Dioxide Thin Films as Methane Gas Sensors

TiO 2 thin film was deposited onto n-Si substrate at 100°C by using a sputtering method, and the film was annealed in air atmosphere at range of 500°C-1000°C. The structural and morphological properties of the all films were investigated by X-ray diffraction and atomic force microscope. The gas sens...

Full description

Saved in:
Bibliographic Details
Published in:IEEE sensors journal 2016-12, Vol.16 (24), p.8890-8896
Main Authors: Comert, Buse, Akin, Nihan, Donmez, Meltem, Saglam, Semran, Ozcelik, Suleyman
Format: Article
Language:English
Subjects:
Annealing
Gas detectors
gas sensors
Grain size
Methane
sputtering
Temperature measurement
Thin film sensors
Titanium compounds
Titanium dioxide
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:TiO 2 thin film was deposited onto n-Si substrate at 100°C by using a sputtering method, and the film was annealed in air atmosphere at range of 500°C-1000°C. The structural and morphological properties of the all films were investigated by X-ray diffraction and atomic force microscope. The gas sensor with interdigitated platinum electrodes was fabricated with photolithographic techniques using the as-deposited and annealed TiO 2 thin films as an active material. The sensitivity of the sensors was determined by altering the conductivity of the sensor material under methane gas with various concentrations at different working temperatures. It was determined that the fabricated sensor using as-deposited TiO 2 thin film with 10-nm particle size has high sensitivity and fast response/recovery time. The sensor operated at 50°C had also sensitive to the methane gas and its detection performance increased with temperatures. It was observed that the fabricated sensors exhibited reproducible and stable results.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2016.2619860