Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

This paper describes a hybrid mass sensing system comprising a QCM (quartz crystal microbalance) mass sensor operating under atmospheric pressure and a 3-DOF mode localized coupled resonator operating in vacuum. Nanoparticles as consecutive mass perturbations are added onto the QCM, the output signa...

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Bibliographic Details
Published in:IEEE sensors journal 2021-04, Vol.21 (7), p.8988-8997
Main Authors: Wang, Yuan, Liu, Huafeng, Wang, Chen, Zhao, Chun, Redoute, Jean-Michel, Stoukatch, Serguei, Xiao, Qijun, Tu, Liang-Cheng, Kraft, Michael
Format: Article
Language:English
Subjects:
Amplitudes
Atmospheric pressure
Coupled modes
Coupled resonator
Crystal resonators
Detectors
Electrical & electronics engineering
Electrostatic devices
Electrostatic force
Engineering, computing & technology
Hybrid systems
Ingénierie électrique & électronique
Ingénierie, informatique & technologie
Liquid contact
Mass perturbation
Mass sensing
Microbalances
Mode localization
Nanoparticles
Natural frequencies
Output signal
Perturbation
Perturbation methods
QCM
Quartz crystal microbalances
Quartz crystals
Resonance amplitudes
Resonant frequencies
Resonant frequency
Resonant frequency shift
Resonators
Sensitivity
Sensor systems
Sensors
Stiffness
Vibration amplitude
Vibration measurement
Vibrations
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Summary:This paper describes a hybrid mass sensing system comprising a QCM (quartz crystal microbalance) mass sensor operating under atmospheric pressure and a 3-DOF mode localized coupled resonator operating in vacuum. Nanoparticles as consecutive mass perturbations are added onto the QCM, the output signals with respect to the amount of mass change are then being manipulated to generate electrostatic forces. Subsequently, the electrostatic forces act on the 3-DOF mode localized coupled resonator as external stiffness perturbations. The output metrics of the hybrid system were defined as: the resonant frequency shifts, vibration amplitude changes, and the changes in resonance amplitude ratio. Measured data was analyzed for these metrics and compared. This work demonstrated that the proposed hybrid mass sensing system attained a {2.5\times }10^{\text 6}{N}{(\text{m}\bullet \text{kg})}^{-1} mass to stiffness transduction factor, and has the potential to be employed as a direct liquid contact biochemical transducer.
ISSN:1530-437X
1558-1748
1558-1748
DOI:10.1109/JSEN.2021.3052046