Nanostructured Silicon-Based Surface Acoustic Wave Sensor for CO 2 Gas Detection

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Bibliographic Details
Published in:IEEE sensors journal 2022-12, Vol.22 (24), p.23756-23764
Main Authors: Ahmad Asri, Muhammad Izzudin, Hasan, Mohammed Nazibul, Nafea, Marwan, Yunos, Yusri Md, Mohamed Ali, Mohamed Sultan
Format: Article
Language:English
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ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2022.3220733