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A Multimodal CMOS MEA for High-Throughput Intracellular Action Potential Measurements and Impedance Spectroscopy in Drug-Screening Applications
Multi-electrode arrays (MEAs) are a candidate technology to screen cardiotoxicity in vitro because they enable noninvasive recording of cardiac beating rate, electrical field potential duration, and other parameters. In this paper, we present an active MEA chip featuring 16 384 electrodes, 1024 simu...
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Published in: | IEEE journal of solid-state circuits 2018-11, Vol.53 (11), p.3076-3086 |
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creator | Lopez, Carolina Mora Chun, Ho Sung Wang, Shiwei Berti, Laurent Putzeys, Jan Van Den Bulcke, Carl Weijers, Jan-Willem Firrincieli, Andrea Reumers, Veerle Braeken, Dries Van Helleputte, Nick |
description | Multi-electrode arrays (MEAs) are a candidate technology to screen cardiotoxicity in vitro because they enable noninvasive recording of cardiac beating rate, electrical field potential duration, and other parameters. In this paper, we present an active MEA chip featuring 16 384 electrodes, 1024 simultaneous readout channels, and 64 stimulation units (SUs) to enable six different cell-interfacing modalities: extracellular and intracellular recording, current and voltage stimulation, fast impedance motoring, and impedance spectroscopy (IS). The chip was designed and fabricated in a 0.13- \mu \text{m} Al CMOS technology, and the electrodes were fabricated on top of the silicon substrate using biocompatible TiN. Measurement results show a total input-referred noise of 7.5 \pm 0.6~\mu \text{V}_{\mathrm{rms}} and 12.0 \pm 2.4~\mu \text{V}_{\mathrm {rms}} for the action potential and full bands, respectively, with a total power consumption of 95 mW for 1024 readout channels. We have experimentally validated the CMOS MEA in in vitro experiments, demonstrating all the different modalities. This novel platform will potentially enable high-throughput electrical activity monitoring and drug screening of cardiomyocytes. |
doi_str_mv | 10.1109/JSSC.2018.2863952 |
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In this paper, we present an active MEA chip featuring 16 384 electrodes, 1024 simultaneous readout channels, and 64 stimulation units (SUs) to enable six different cell-interfacing modalities: extracellular and intracellular recording, current and voltage stimulation, fast impedance motoring, and impedance spectroscopy (IS). The chip was designed and fabricated in a 0.13-<inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> Al CMOS technology, and the electrodes were fabricated on top of the silicon substrate using biocompatible TiN. Measurement results show a total input-referred noise of <inline-formula> <tex-math notation="LaTeX">7.5 \pm 0.6~\mu \text{V}_{\mathrm{rms}} </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">12.0 \pm 2.4~\mu \text{V}_{\mathrm {rms}} </tex-math></inline-formula> for the action potential and full bands, respectively, with a total power consumption of 95 mW for 1024 readout channels. We have experimentally validated the CMOS MEA in in vitro experiments, demonstrating all the different modalities. This novel platform will potentially enable high-throughput electrical activity monitoring and drug screening of cardiomyocytes.]]></description><identifier>ISSN: 0018-9200</identifier><identifier>EISSN: 1558-173X</identifier><identifier>DOI: 10.1109/JSSC.2018.2863952</identifier><identifier>CODEN: IJSCBC</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Active electrode ; Biocompatibility ; cardiotoxicity ; Channels ; CMOS ; Computer architecture ; drug screening ; Drugs ; electrical recording ; electrical stimulation ; Electrodes ; Extracellular ; high throughput ; Impedance ; Impedance spectroscopy ; impedance spectroscopy (IS) ; intracellular recording ; Microprocessors ; Monitoring ; multi-electrode array (MEA) ; multi-modality ; Power consumption ; Recording ; Screening ; Silicon substrates ; Spectrum analysis ; Stimulation</subject><ispartof>IEEE journal of solid-state circuits, 2018-11, Vol.53 (11), p.3076-3086</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2018</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c359t-61b6cf4e6b6a80a720a8339001d9439e424c360412aa63d434ef80ff2507b653</citedby><cites>FETCH-LOGICAL-c359t-61b6cf4e6b6a80a720a8339001d9439e424c360412aa63d434ef80ff2507b653</cites><orcidid>0000-0003-4200-0001 ; 0000-0002-7511-1923</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/8453808$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,54796</link.rule.ids></links><search><creatorcontrib>Lopez, Carolina Mora</creatorcontrib><creatorcontrib>Chun, Ho Sung</creatorcontrib><creatorcontrib>Wang, Shiwei</creatorcontrib><creatorcontrib>Berti, Laurent</creatorcontrib><creatorcontrib>Putzeys, Jan</creatorcontrib><creatorcontrib>Van Den Bulcke, Carl</creatorcontrib><creatorcontrib>Weijers, Jan-Willem</creatorcontrib><creatorcontrib>Firrincieli, Andrea</creatorcontrib><creatorcontrib>Reumers, Veerle</creatorcontrib><creatorcontrib>Braeken, Dries</creatorcontrib><creatorcontrib>Van Helleputte, Nick</creatorcontrib><title>A Multimodal CMOS MEA for High-Throughput Intracellular Action Potential Measurements and Impedance Spectroscopy in Drug-Screening Applications</title><title>IEEE journal of solid-state circuits</title><addtitle>JSSC</addtitle><description><![CDATA[Multi-electrode arrays (MEAs) are a candidate technology to screen cardiotoxicity in vitro because they enable noninvasive recording of cardiac beating rate, electrical field potential duration, and other parameters. In this paper, we present an active MEA chip featuring 16 384 electrodes, 1024 simultaneous readout channels, and 64 stimulation units (SUs) to enable six different cell-interfacing modalities: extracellular and intracellular recording, current and voltage stimulation, fast impedance motoring, and impedance spectroscopy (IS). The chip was designed and fabricated in a 0.13-<inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> Al CMOS technology, and the electrodes were fabricated on top of the silicon substrate using biocompatible TiN. Measurement results show a total input-referred noise of <inline-formula> <tex-math notation="LaTeX">7.5 \pm 0.6~\mu \text{V}_{\mathrm{rms}} </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">12.0 \pm 2.4~\mu \text{V}_{\mathrm {rms}} </tex-math></inline-formula> for the action potential and full bands, respectively, with a total power consumption of 95 mW for 1024 readout channels. We have experimentally validated the CMOS MEA in in vitro experiments, demonstrating all the different modalities. This novel platform will potentially enable high-throughput electrical activity monitoring and drug screening of cardiomyocytes.]]></description><subject>Active electrode</subject><subject>Biocompatibility</subject><subject>cardiotoxicity</subject><subject>Channels</subject><subject>CMOS</subject><subject>Computer architecture</subject><subject>drug screening</subject><subject>Drugs</subject><subject>electrical recording</subject><subject>electrical stimulation</subject><subject>Electrodes</subject><subject>Extracellular</subject><subject>high throughput</subject><subject>Impedance</subject><subject>Impedance spectroscopy</subject><subject>impedance spectroscopy (IS)</subject><subject>intracellular recording</subject><subject>Microprocessors</subject><subject>Monitoring</subject><subject>multi-electrode array (MEA)</subject><subject>multi-modality</subject><subject>Power consumption</subject><subject>Recording</subject><subject>Screening</subject><subject>Silicon substrates</subject><subject>Spectrum analysis</subject><subject>Stimulation</subject><issn>0018-9200</issn><issn>1558-173X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNo9kMtq4zAUhsXQwqSXByizEczaGd2syEuT3lIaOuAsZmcU-ThRcSRXkhd5ir5yFVJmdfg5_38uH0J3lMwpJdWfl6ZZzhmhas6U5FXJfqAZLUtV0AX_d4FmJLeKihHyE13F-J6lEIrO0GeN19OQ7MF3esDL9VuD1w817n3Az3a3Lzb74KfdfpwSXrkUtIFhmAYdcG2S9Q7_9Qlcsjm7Bh2nAIcsI9auw6vDCJ12BnAzgknBR-PHI7YO34dpVzQmADjrdrgex8EafZoXb9Blr4cIt9_1Gm0eHzbL5-L17Wm1rF8Lw8sqFZJupekFyK3UiugFI1pxXuW3ukrwCgQThksiKNNa8k5wAb0ifc9KstjKkl-j3-exY_AfE8TUvvspuLyxZZQtKikV49lFzy6Tj48B-nYM9qDDsaWkPWFvT9jbE_b2G3vO_DpnLAD89ytRckUU_wJfnX93</recordid><startdate>20181101</startdate><enddate>20181101</enddate><creator>Lopez, Carolina Mora</creator><creator>Chun, Ho Sung</creator><creator>Wang, Shiwei</creator><creator>Berti, Laurent</creator><creator>Putzeys, Jan</creator><creator>Van Den Bulcke, Carl</creator><creator>Weijers, Jan-Willem</creator><creator>Firrincieli, Andrea</creator><creator>Reumers, Veerle</creator><creator>Braeken, Dries</creator><creator>Van Helleputte, Nick</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-4200-0001</orcidid><orcidid>https://orcid.org/0000-0002-7511-1923</orcidid></search><sort><creationdate>20181101</creationdate><title>A Multimodal CMOS MEA for High-Throughput Intracellular Action Potential Measurements and Impedance Spectroscopy in Drug-Screening Applications</title><author>Lopez, Carolina Mora ; Chun, Ho Sung ; Wang, Shiwei ; Berti, Laurent ; Putzeys, Jan ; Van Den Bulcke, Carl ; Weijers, Jan-Willem ; Firrincieli, Andrea ; Reumers, Veerle ; Braeken, Dries ; Van Helleputte, Nick</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c359t-61b6cf4e6b6a80a720a8339001d9439e424c360412aa63d434ef80ff2507b653</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Active electrode</topic><topic>Biocompatibility</topic><topic>cardiotoxicity</topic><topic>Channels</topic><topic>CMOS</topic><topic>Computer architecture</topic><topic>drug screening</topic><topic>Drugs</topic><topic>electrical recording</topic><topic>electrical stimulation</topic><topic>Electrodes</topic><topic>Extracellular</topic><topic>high throughput</topic><topic>Impedance</topic><topic>Impedance spectroscopy</topic><topic>impedance spectroscopy (IS)</topic><topic>intracellular recording</topic><topic>Microprocessors</topic><topic>Monitoring</topic><topic>multi-electrode array (MEA)</topic><topic>multi-modality</topic><topic>Power consumption</topic><topic>Recording</topic><topic>Screening</topic><topic>Silicon substrates</topic><topic>Spectrum analysis</topic><topic>Stimulation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lopez, Carolina Mora</creatorcontrib><creatorcontrib>Chun, Ho Sung</creatorcontrib><creatorcontrib>Wang, Shiwei</creatorcontrib><creatorcontrib>Berti, Laurent</creatorcontrib><creatorcontrib>Putzeys, Jan</creatorcontrib><creatorcontrib>Van Den Bulcke, Carl</creatorcontrib><creatorcontrib>Weijers, Jan-Willem</creatorcontrib><creatorcontrib>Firrincieli, Andrea</creatorcontrib><creatorcontrib>Reumers, Veerle</creatorcontrib><creatorcontrib>Braeken, Dries</creatorcontrib><creatorcontrib>Van Helleputte, Nick</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) Online</collection><collection>IEEE/IET Electronic Library</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE journal of solid-state circuits</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lopez, Carolina Mora</au><au>Chun, Ho Sung</au><au>Wang, Shiwei</au><au>Berti, Laurent</au><au>Putzeys, Jan</au><au>Van Den Bulcke, Carl</au><au>Weijers, Jan-Willem</au><au>Firrincieli, Andrea</au><au>Reumers, Veerle</au><au>Braeken, Dries</au><au>Van Helleputte, Nick</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Multimodal CMOS MEA for High-Throughput Intracellular Action Potential Measurements and Impedance Spectroscopy in Drug-Screening Applications</atitle><jtitle>IEEE journal of solid-state circuits</jtitle><stitle>JSSC</stitle><date>2018-11-01</date><risdate>2018</risdate><volume>53</volume><issue>11</issue><spage>3076</spage><epage>3086</epage><pages>3076-3086</pages><issn>0018-9200</issn><eissn>1558-173X</eissn><coden>IJSCBC</coden><abstract><![CDATA[Multi-electrode arrays (MEAs) are a candidate technology to screen cardiotoxicity in vitro because they enable noninvasive recording of cardiac beating rate, electrical field potential duration, and other parameters. In this paper, we present an active MEA chip featuring 16 384 electrodes, 1024 simultaneous readout channels, and 64 stimulation units (SUs) to enable six different cell-interfacing modalities: extracellular and intracellular recording, current and voltage stimulation, fast impedance motoring, and impedance spectroscopy (IS). The chip was designed and fabricated in a 0.13-<inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> Al CMOS technology, and the electrodes were fabricated on top of the silicon substrate using biocompatible TiN. Measurement results show a total input-referred noise of <inline-formula> <tex-math notation="LaTeX">7.5 \pm 0.6~\mu \text{V}_{\mathrm{rms}} </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">12.0 \pm 2.4~\mu \text{V}_{\mathrm {rms}} </tex-math></inline-formula> for the action potential and full bands, respectively, with a total power consumption of 95 mW for 1024 readout channels. We have experimentally validated the CMOS MEA in in vitro experiments, demonstrating all the different modalities. This novel platform will potentially enable high-throughput electrical activity monitoring and drug screening of cardiomyocytes.]]></abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSSC.2018.2863952</doi><tpages>11</tpages><orcidid>https://orcid.org/0000-0003-4200-0001</orcidid><orcidid>https://orcid.org/0000-0002-7511-1923</orcidid></addata></record> |
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subjects | Active electrode Biocompatibility cardiotoxicity Channels CMOS Computer architecture drug screening Drugs electrical recording electrical stimulation Electrodes Extracellular high throughput Impedance Impedance spectroscopy impedance spectroscopy (IS) intracellular recording Microprocessors Monitoring multi-electrode array (MEA) multi-modality Power consumption Recording Screening Silicon substrates Spectrum analysis Stimulation |
title | A Multimodal CMOS MEA for High-Throughput Intracellular Action Potential Measurements and Impedance Spectroscopy in Drug-Screening Applications |
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