Nanophotonics Sensor Based on Microcantilever for Chemical Analysis

A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever...

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 2009-09, Vol.15 (5), p.1323-1326
Main Authors: Xiang, Wenfeng, Lee, Chengkuo
Format: Article
Language:English
Subjects:
Chemical analysis
Chemical sensors
Computer simulation
Deflection
Mathematical models
MEMS
microcantilever
Micromechanical devices
Nanomaterials
nanomechanical sensor
Nanophotonics
Nanostructure
NEMS
Optical resonators
Optical sensors
Optoelectronic and photonic sensors
photonic crystal resonator
Photonic crystals
Polycarbonates
Resonance
Resonators
Sensors
Wavelength measurement
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Summary:A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z -displacement and strain of Si/SiO 2 cantilever sensor are derived as 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution.
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2009.2016578