A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber c...

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 2009-09, Vol.15 (5), p.1529-1536
Main Authors: Chengkuo Lee, Fu-Li Hsiao, Kobayashi, T., Kah How Koh, Ramana, P.V., Wenfeng Xiang, Bin Yang, Chee Wei Tan, Pinjala, D.
Format: Article
Language:English
Subjects:
Actuators
Attenuators
Driving
Electric potential
Lead zirconate titanates
Microelectromechanical systems
Microelectromechanical systems (MEMS)
Micromechanical devices
mirror
Mirrors
Optical attenuators
Optical collimators
Optical films
optical MEMS
Optical reflection
piezoelectric actuator
Piezoelectric actuators
Piezoelectric films
PZT
Silicon
Thin films
variable optical attenuators (VOAs)
Voltage
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Summary:A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2009.2022959