Fiber-Coupled Ozone Sensor Based on Tuning Fork-Enhanced Interferometric Photoacoustic Spectroscopy

In this paper, a completely fiber-coupled ozone sensor based on tuning fork (TF)-enhanced photoacoustic spectroscopy is presented. Crystalline silicon micro-TFs are processed and characterized. Their photoacoustically induced motion is monitored by a compact intensity interferometer. An acoustic mic...

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 2012-09, Vol.18 (5), p.1566-1572
Main Authors: Köhring, M., Willer, U., Böttger, S., Pohlkötter, A., Schade, W.
Format: Article
Language:English
Subjects:
Acoustic noise
Calibration
Crystal structure
Gas detectors
Laser beams
Lasers
Measurement by laser beam
optical fiber applications
Optical fiber sensors
Optical fibers
Optical interferometry
Optical resonators
Ozone
photoacoustic (PA) effect
Photoacoustic spectroscopy
Resonant frequency
Sensors
spectroscopy
Tuning
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Summary:In this paper, a completely fiber-coupled ozone sensor based on tuning fork (TF)-enhanced photoacoustic spectroscopy is presented. Crystalline silicon micro-TFs are processed and characterized. Their photoacoustically induced motion is monitored by a compact intensity interferometer. An acoustic microresonator for this new type of TFs is optimized. A frequency-doubled Nd:YAG laser is used as an excitation source. The sensor performance is assessed by calibration measurements. It reaches a detection limit of S = 2.13 ppm ± 0.02 ppm and a noise-equivalent absorption sensitivity of D = (1.27 × 10 -9 ± 1.2 × 10 -11 ) cm -1 W(Hz) -1/2 .
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2012.2182761