Effect of the composition on the electrical properties of TaSi/sub x/N y metal gate electrodes

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Bibliographic Details
Published in:IEEE electron device letters 2003-07, Vol.24 (7), p.439-441
Main Authors: You-Seok Suh, Heuss, G.P., Jae-Hoon Lee, Misra, V.
Format: Article
Language:English
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2003.814009