hboxBaSm_2hboxTi_4hboxO_12$Thin Film for High-Performance Metal–Insulator–Metal Capacitors

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Bibliographic Details
Published in:IEEE electron device letters 2006-09, Vol.27 (9), p.740-742
Main Authors: Kim, B.J., Jeong, Y.H., Jang, B.Y., Lim, J.B., Nahm, S., Sun, H.-J., Lee, H.J.
Format: Article
Language:English
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ISSN:0741-3106
DOI:10.1109/LED.2006.881085