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Low Subthreshold Swing and High Mobility Amorphous Indium–Gallium–Zinc-Oxide Thin-Film Transistor With Thin HfO 2 Gate Dielectric and Excellent Uniformity
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Published in: | IEEE electron device letters 2020-06, Vol.41 (6), p.856-859 |
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Main Authors: | , , , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0741-3106 1558-0563 |
DOI: | 10.1109/LED.2020.2985787 |