A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio sensitivity, a stiff anchor support is employed as a mechanical coupler between resonators. A coupling factor of...

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Bibliographic Details
Published in:IEEE electron device letters 2020-10, Vol.41 (10), p.1560-1563
Main Authors: Zhang, Hemin, Sobreviela, Guillermo, Chen, Dongyang, Pandit, Milind, Sun, Jiangkun, Zhao, Chun, Seshia, Ashwin
Format: Article
Language:English
Subjects:
accelerometer
Accelerometers
coupled resonators
Couplers
Coupling
Couplings
Environmental effects
MEMS resonators
Microelectromechanical systems
Parameter sensitivity
Perturbation methods
Resonant frequency
Resonators
Sensors
Temperature control
Vibration mode localization
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Summary:An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio sensitivity, a stiff anchor support is employed as a mechanical coupler between resonators. A coupling factor of 7.4\times 10^{-5} was obtained, which is so far the lowest mechanical coupling factor that has been reported for weakly coupled MEMS sensors. As a result, the proposed mode-localized accelerometer demonstrates an input-referred bias instability as high as 280ng within an integration time from 3s to 300s, and an input-referred noise floor of 250ng/ \surd Hz, without utilizing temperature control or other environmental compensation, benchmarking as the highest resolution mode-localized accelerometer to-date. These metrics are comparable to state-of-the-art MEMS frequency-modulated resonant and capacitive accelerometers while exhibiting superior common-mode rejection to environmental effects.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2020.3020527