Micron-Scale Resolution Image Sensor Based on Flexible Organic Thin Film Transistor Arrays via Femtosecond Laser Processing

Arrays of flexible organic thin-film transistors (OTFTs) are the prerequisite to realize commercialization of flexible electronics. However, photolithography and print techniques are uneasy to combine high performance, high integration density, and compatibility with flexible substrates to fabricate...

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Bibliographic Details
Published in:IEEE electron device letters 2022-02, Vol.43 (2), p.248-251
Main Authors: Chen, Gengxu, Yu, Weijie, Hao, Yanxue, Peng, Gang, Yu, Xipeng, Dai, Yan, Chen, Huipeng, Guo, Tailiang
Format: Article
Language:English
Subjects:
ablation
Bending
Commercialization
Electronic devices
Femtosecond laser
Flexible components
image sensor
Laser ablation
Laser arrays
Laser processing
Lasers
Optimized production technology
Organic thin film transistors
organic thin-film transistors (OTFTs)
Photolithography
Semiconductor devices
Sensor arrays
Substrates
Thermal stability
Thin film transistors
Transistors
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Summary:Arrays of flexible organic thin-film transistors (OTFTs) are the prerequisite to realize commercialization of flexible electronics. However, photolithography and print techniques are uneasy to combine high performance, high integration density, and compatibility with flexible substrates to fabricate OTFT arrays. In this work, OTFT arrays with high resolution, flexibility and process convenience are patterned by femtosecond laser (fs-laser). 1 cm 2 of area can accommodate up to 6250 transistors with sharp edges and short channel lengths by selective processing. Furthermore, micron-scale resolution flexible image sensor with integration potential were verified. Hence, these results will impel the development of flexible wearable electronic devices in the future.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2021.3133264