Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}\times {7} array along with the analog-front-end circuit has been configured to work as a linear...

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Bibliographic Details
Published in:IEEE electron device letters 2022-07, Vol.43 (7), p.1113-1116
Main Authors: Zamora, I., Ledesma, E., Uranga, A., Barniol, N.
Format: Article
Language:English
Subjects:
Acoustic beams
Acoustic transducers
Acoustics
Analog circuits
Beam steering
CMOS
Delays
Directivity
Imaging
Micromachining
Phased arrays
piezoelectric micromachined ultrasonic transducers (PMUT)
Piezoelectricity
PMUT-on-CMOS
Signal to noise ratio
Transducers
Ultrasonic imaging
ultrasound imaging
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Summary:In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}\times {7} array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single {7}\times {1} AlScN PMUT-on-CMOS channel as a receiver has been obtained.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2022.3175323