Ultra-Small Size Micro-LEDs With Enhanced Efficiency for Near-Eye Display

Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of {1}.{3}\times {1}.{5}~\mu m2 were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N2O plasma treatment process was deployed to minimize the sidewall non-radiative recombi...

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Bibliographic Details
Published in:IEEE electron device letters 2024-07, Vol.45 (7), p.1241-1244
Main Authors: Xu, Feifan, Tao, Tao, Zhang, Dongqi, Sang, Yimeng, Yu, Junchi, He, Honghui, Huang, Jinpeng, Zhi, Ting, Zhuang, Zhe, Xie, Zili, Zhang, Rong, Liu, Bin
Format: Article
Language:English
Subjects:
Brightness
efficiency
Light emitting diodes
Micro light-emitting diodes (Micro-LEDs)
near-eye display
Optical device fabrication
Optical surface waves
passivation
Plasmas
Radiative recombination
Semiconductor diodes
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Summary:Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of {1}.{3}\times {1}.{5}~\mu m2 were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N2O plasma treatment process was deployed to minimize the sidewall non-radiative recombination and increase radiative efficiency of Micro-LEDs. The experimental results demonstrated a significant improvement in external quantum efficiency (EQE) of blue and green Micro-LEDs, with peak EQE of 22.3% and 19.3%, respectively. High brightness and optical power density was acquired exceeding {5}\times {10} ^{{7}} nits and {7}\times {10} ^{{4}} mW/cm2. And excellent wavelength and efficiency stability were demonstrated with respect to the temperature. This results illustrate an immense potential of Micro-LEDs for high resolution near-eye display applications.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2024.3401132