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Blocking Flying Crosstalk in BEOL Validated in Antenna Switches in 45-nm SOI CMOS
Flying crosstalk through the back-end-of-the-line (BEOL) above the silicon substrate is an emerging design challenge to RF ICs, which cannot be addressed by conventional in-Si noise reduction structures. This letter reports a new concept of using in-BEOL metal wall structures, implemented by 3-D het...
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| Published in: | IEEE microwave and wireless components letters 2018-11, Vol.28 (11), p.1005-1007 |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c293t-5f63fdf836fe5b69e538e5500ee3d2a1ab00c5e5c849b7ceb9a18cbe9c41345a3 |
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| cites | cdi_FETCH-LOGICAL-c293t-5f63fdf836fe5b69e538e5500ee3d2a1ab00c5e5c849b7ceb9a18cbe9c41345a3 |
| container_end_page | 1007 |
| container_issue | 11 |
| container_start_page | 1005 |
| container_title | IEEE microwave and wireless components letters |
| container_volume | 28 |
| creator | Wang, Chenkun Chen, Qi Lu, Fei Li, Cheng Zhang, Feilong Wang, Albert |
| description | Flying crosstalk through the back-end-of-the-line (BEOL) above the silicon substrate is an emerging design challenge to RF ICs, which cannot be addressed by conventional in-Si noise reduction structures. This letter reports a new concept of using in-BEOL metal wall structures, implemented by 3-D heterogeneous integration, to efficiently suppress the above-Si flying global crosstalk. It was validated using a set of single-pole-double-throw transmitter/receiver (T/Rx) antenna switches fabricated in a foundry 45-nm silicon-on-insulator CMOS process. Measurement shows significant interswitch crosstalk reduction of ~18.5 dB or ~98.6% suppression clearly. |
| doi_str_mv | 10.1109/LMWC.2018.2873197 |
| format | article |
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| ispartof | IEEE microwave and wireless components letters, 2018-11, Vol.28 (11), p.1005-1007 |
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| source | IEEE Electronic Library (IEL) Journals |
| subjects | Antenna switch Antennas back-end-of-the-line (BEOL) CMOS CMOS technology Crosstalk Integrated circuit synthesis metal wall Noise reduction Radio frequency Silicon substrates Silicon-on-insulator SOI (semiconductors) Switches |
| title | Blocking Flying Crosstalk in BEOL Validated in Antenna Switches in 45-nm SOI CMOS |
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