Micromirror device with reversibly adjustable properties

In this letter, a novel adjustable micromirror device using multiple electrodes is presented. The novel design allows post fabrication continuous and reversible adjustment of the electromechanical response and pull-in instability. This property is demonstrated on a fabricated device and is used for...

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Bibliographic Details
Published in:IEEE photonics technology letters 2003-05, Vol.15 (5), p.733-735
Main Authors: Bochobza-Degani, O., Elata, D., Nemirovsky, Y.
Format: Article
Language:English
Subjects:
Actuators
Adjustable
Devices
Displays
Dynamic response
Electrodes
Electrostatics
Fabrication
Gray-scale
Instability
Microelectromechanical systems
Micromechanical devices
Micromirrors
Modulation
Stability
Voltage
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Summary:In this letter, a novel adjustable micromirror device using multiple electrodes is presented. The novel design allows post fabrication continuous and reversible adjustment of the electromechanical response and pull-in instability. This property is demonstrated on a fabricated device and is used for analog adjustment of the stable angular travel range of the micromirror. In addition, the inherent properties of the device enable simple duty cycle modulation of the dynamic response that can be used for gray-scale control. These properties are in contrast to prevalent torsion actuators in which the angular travel range and pull-in instability are set and cannot be changed once the device is fabricated.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2003.809976