Tuning of photonic crystal waveguide microcavity by thermooptic effect

A tunable photonic crystal microcavity with in-filling holes has been experimentally realized by using the thermooptic effect in silicon-on-insulator waveguide at /spl lambda/=1530 nm. The device was fabricated by reactive ion etching through the silicon core layer for high vertical confinement. A t...

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Bibliographic Details
Published in:IEEE photonics technology letters 2004-06, Vol.16 (6), p.1528-1530
Main Authors: Chong, H.M.H., De La Rue, R.M.
Format: Article
Language:English
Subjects:
Etching
Heaters
Heating equipment
Microcavities
Optical tuning
Photonic crystals
Reactive ion etching
Refractive index
Resonance
Silicon on insulator technology
Temperature
Thermooptic effects
Thin films
Transistors
Tuning
Waveguides
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Summary:A tunable photonic crystal microcavity with in-filling holes has been experimentally realized by using the thermooptic effect in silicon-on-insulator waveguide at /spl lambda/=1530 nm. The device was fabricated by reactive ion etching through the silicon core layer for high vertical confinement. A thin film heater has been integrated onto the microcavity. A small change in temperature (and consequent change in refractive index) was sufficient to cause an observable resonance shift. A resonance shift of 5 nm was achieved when the heater was switched on to a current of 1.2 mA (with switching power of about 9 mW).
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2004.826781