Amorphous Silicon 3-D Tapers for Si Photonic Wires Fabricated With Shadow Masks

Three-dimensional taper structures made from plasma-enhanced chemical vapor-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with...

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Bibliographic Details
Published in:IEEE photonics technology letters 2008-09, Vol.20 (17), p.1452-1454
Main Authors: Harke, A., Lipka, T., Amthor, J., Horn, O., Krause, M., Muller, J.
Format: Article
Language:English
Subjects:
Amorphous silicon
Deposition
Etching
Mathematical models
Optical coupling
Optical device fabrication
Optical fiber couplers
Optical losses
Optical waveguides
Photonic crystals
Photonics
Plasma applications
Shadow masks
Silicon
Solvers
Wire
Wires
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Summary:Three-dimensional taper structures made from plasma-enhanced chemical vapor-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with shadow-masks made from KOH-etched Si wafers, and with the tapers light was coupled into 500-nm-wide photonic wires from lensed fibers.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2008.927891