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Continuously Tunable, Polarization Stable SWG MEMS VCSELs at 1.55 \mu
We present polarization stable, tunable long-wavelength vertical-cavity-surface-emitting lasers (VCSELs) at 1.55 μm based on InP. The tuning is accomplished by a two-chip membrane mounting technique denoted as bulk-micro-machining. The membrane consists of a GaAs-based distributed Bragg reflector an...
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Published in: | IEEE photonics technology letters 2013-05, Vol.25 (9), p.841-843 |
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Main Authors: | , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We present polarization stable, tunable long-wavelength vertical-cavity-surface-emitting lasers (VCSELs) at 1.55 μm based on InP. The tuning is accomplished by a two-chip membrane mounting technique denoted as bulk-micro-machining. The membrane consists of a GaAs-based distributed Bragg reflector and represents the top mirror. By its electro thermal actuation, cavity tuning occurs. This results in a continuous wavelength shift. Polarization stability is achieved by an implemented semiconductor/air subwavelength grating (SWG) written in the top-most layers of the membrane facing the VCSEL eye after mounting process. The SWG integration is realized by a combination of holographic lithography, barrel, and reactive ion etching. The manufactured micro-electro-mechanical-system SWG-VCSELs show a continuous, polarization stable wavelength tuning of ~ 25 nm with a peak optical power of 4 mW fiber-coupled in an MMF and thresholds of 3-3.5 mA. |
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ISSN: | 1041-1135 1941-0174 |
DOI: | 10.1109/LPT.2013.2250276 |