Improved Transmission Line Parameter Calculation Through TCAD Process Modeling for Superconductor Integrated Circuit Interconnects

The Florida Object-Oriented Device, Process and Reliability Simulator (FLOOXS) technology computer-aided design process modeling tools developed at the University of Florida have been adapted under the Intelligence Advanced Research Projects Activity SuperTools program to support the MIT Lincoln Lab...

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 2020-10, Vol.30 (7), p.1-4
Main Authors: Herbst, Heinrich Frederick, Roux, Paul le, Jackman, Kyle, Fourie, Coenrad Johann
Format: Article
Language:English
Subjects:
CAD
Circuit reliability
Computer aided design
Computer simulation
Florida Object-Oriented Device
Geometry
Integrated circuit modeling
Integrated circuits
Layouts
Mathematical models
Object oriented modeling
passive transmission line
Power transmission lines
Process and Reliability Simulator (FLOOXS)
Process modeling
Process parameters
Research projects
Superconducting integrated circuits
Superconducting transmission lines
superconductor process modeling
technology computer-aided design (TCAD)
Transmission lines
Water transportation
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Summary:The Florida Object-Oriented Device, Process and Reliability Simulator (FLOOXS) technology computer-aided design process modeling tools developed at the University of Florida have been adapted under the Intelligence Advanced Research Projects Activity SuperTools program to support the MIT Lincoln Laboratory SFQ5ee fabrication process. We use FLOOXS to build meshed models of passive transmission lines from superconductor integrated circuit layouts. We have previously developed a numerical solver that extracts transmission line parameters from the meshed model. In this work, we convert a layout slice to FLOOXS inputs, generate two-dimensional meshes of cross-sectional geometries from simulated process steps, and then extract the transmission line parameters from the meshes. Results are shown compared against the results for simplified transmission lines that do not utilize process modeling. The results confirm that process modeling alters the extracted parameter values and suggest that process modeling will become more important as cell density of superconducting electronics increases. We conclude with a discussion on the necessity of process modeling for high-quality parameter extraction.
ISSN:1051-8223
1558-2515
DOI:10.1109/TASC.2020.3006988