Microfabrication and Characterization of W-Band Planar Helix Slow-Wave Structure With Straight-Edge Connections

A slow-wave structure (SWS) consisting of a planar helix with straight-edge connections and incorporating a coplanar waveguide feed has been designed for operation at W-band and has been fabricated using microfabrication technique. On-wafer cold measurements have been carried out on a number of fabr...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2011-11, Vol.58 (11), p.4098-4105
Main Authors: Ciersiang Chua, Tsai, Julius M., Aditya, S., Min Tang, Soon Wee Ho, Zhongxiang Shen, Lei Wang
Format: Article
Language:English
Subjects:
Applied sciences
Attenuation
Bridges
Cold-test parameters
Conductivity
Coplanar waveguides
Electrical resistivity
electron devices
Electronic tubes, masers
Electronics
Exact sciences and technology
Fabrication
Frequency ranges
Joints
lithography
Metals
Micro- and nanoelectromechanical devices (mems/nems)
Microelectronic fabrication (materials and surfaces technology)
microstructure
millimeter-wave measurements
radio-frequency microelectromechanical systems
Rough surfaces
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Silicon
Silicon wafers
Simulation
slow-wave structure (SWS)
Surface roughness
Traveling wave tubes
traveling-wave tube (TWT)
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Summary:A slow-wave structure (SWS) consisting of a planar helix with straight-edge connections and incorporating a coplanar waveguide feed has been designed for operation at W-band and has been fabricated using microfabrication technique. On-wafer cold measurements have been carried out on a number of fabricated SWSs, and the results are reported here for the first time. The parameters measured are return loss, attenuation, and phase velocity, and the results cover a frequency range of 70-100 GHz. Cold-test parameters of the SWS have been also obtained using simulations, and the effects of fabrication, such as surface roughness, have been accounted for by estimating effective conductivity of different parts of the microfabricated structures. The measured and simulated results match well. The effects of silicon wafer resistivity have been also discussed. Planar helical SWSs fabricated in this manner have application in traveling-wave tubes operating at millimeter wave and higher frequencies.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2011.2165284