Investigation of Pt-Salt-Doped-Standalone- Multiwall Carbon Nanotubes for On-Chip Interconnect Applications

In this paper, we investigate, by combining electrical measurements with an atomistic-to-circuit modeling approach, the conductance of doped standalone multiwall carbon nanotubes (CNTs) as a viable candidate for the next generation of back-end-of-line interconnects. Ab initio simulations predict a d...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2019-05, Vol.66 (5), p.2346-2352
Main Authors: Liang, Jie, Chen, Rongmei, Ramos, Raphael, Lee, Jaehyun, Okuno, Hanako, Kalita, Dipankar, Georgiev, Vihar, Berrada, Salim, Sadi, Toufik, Uhlig, Benjamin, Lilienthal, Katherina, Dhavamani, Abitha, Konemann, Fabian, Gotsmann, Bernd, Goncalves, Goncalves, Chen, Bingan, Asenov, Asen, Dijon, Jean, Todri-Sanial, Aida
Format: Article
Language:English
Subjects:
Carbon nanotube (CNT)
Chirality
CNT contact resistance
Computer Science
Computer simulation
Conductivity
Contact resistance
defective CNTs
Digital Libraries
doped CNTs
Doping
doping process of CNT
Electric contacts
Electrical measurement
Electrons
Engineering Sciences
Immune system
individual CNT growth
local on-chip interconnects
Micro and nanotechnologies
Microelectronics
Multi wall carbon nanotubes
Platinum
Resistance
Semiconductor process modeling
System-on-chip
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Summary:In this paper, we investigate, by combining electrical measurements with an atomistic-to-circuit modeling approach, the conductance of doped standalone multiwall carbon nanotubes (CNTs) as a viable candidate for the next generation of back-end-of-line interconnects. Ab initio simulations predict a doping-related shift of the Fermi level, which reduces shell chirality variability and improves electrical resistivity up to 90% by converting semiconducting shells to metallic. Electrical measurements of Pt-salt-doped CNTs provide up to 50% of resistance reduction, which is a milestone result for future CNT interconnect technology. Moreover, we find that defects and contacts introduce additional resistance, which limits the efficiency of doping, and are the primary cause for the mismatch between theoretical predictions and experimental measurements on doped CNTs.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2019.2901658