An AlN Piezoelectric Micromachined Ultrasonic Transducer-Based Liquid Density Sensor

• Published in: IEEE transactions on electron devices 2023-01, Vol.70 (1), p.1-8
• Main Authors: Li, Zhihao, Gao, Yunfei, Chen, Minkan, Lou, Liang, Ren, Hao
• Format: Article
• Language: English
• Subjects: Aluminum nitride; Aqueous solutions; Density; Digital holographic microscope (DHM); Electrical impedance; III-V semiconductor materials; liquid density; Liquids; Mathematical analysis; Micromachining; Optical measurement; Physical properties; piezoelectric micromachined ultrasonic transducer (PMUT); Piezoelectricity; Q factors; Quartz crystals; resolution; Resonant frequencies; Resonant frequency; Sensitivity; Sensors; Ultrasonic transducers; Vibration measurement; Vibrations; Viscosity
• ISSN: 0018-9383; 1557-9646
• DOI: 10.1109/TED.2022.3222662

As an important physical parameter of liquids, the liquid density plays an important role in many applications. As a result, the development of liquid density sensors is critical. However, current liquid density sensors have drawbacks, such as large size of conventional liquid density sensors, low quality factor of microcantilever beam structures, low sensitivity of quartz crystal tuning forks, and high operating frequency requirement of surface-acoustic-wave Love-mode resonators. In this article, we report an aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT)-based liquid density sensor to mitigate the aforementioned drawbacks of traditional liquid density sensors. The PMUT sensor utilizes CMOS-compatible AlN as the piezoelectric material. This sensor operates by measuring the change in resonant frequency of the PMUT to calculate the liquid density. In an experiment, the resonance of the PMUT sensor is measured by a digital holographic microscope (DHM), which allows direct measurement of the PMUT surface displacement, providing intuitive vibration amplitude and mode. Moreover, the DHM-based optical measurement approach has a higher sensitivity than the conventional electrical impedance-based measurement approach, allowing measurement of weak PMUT vibrations in dense liquids. The quality factor ( \textit{Q} ) value of the PMUT sensor is measured to be 49.38 in water. A high sensitivity of 12.71 kHz/(g \cdot cm ^{-\text{3}} ) was determined for this sensor by measuring the resonant frequencies immersed in different glycerol aqueous solutions. We measured 12 PMUTs and the maximum deviation of resonant frequency between different PMUTs is 9.85%. For the first time, the resolution of the PMUT density sensor is determined to be 5.9 \times 10 ^{-\text{4}} g \cdot cm ^{-\text{3}} .