Wake-Up and Endurance Characteristics in Hf 0.5 Zr 0.5 O 2 -Based Metal-Ferroelectric-Metal Capacitor Depending on the Crystal Orientation of the TiN Bottom Electrodes

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Bibliographic Details
Published in:IEEE transactions on electron devices 2023-04, Vol.70 (4), p.1983-1988
Main Authors: Han, Dong Hee, Lee, Ae Jin, Nam, Min Kyeong, Lee, Seungwoo, Choi, Su Jin, Kim, Youngjin, Moon, Taehwan, Jeon, Woojin
Format: Article
Language:English
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ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2023.3243579