Sub-5-Å La 2 O 3 In Situ Dipole Technique for Large V FB Modulation With EOT Reduction and Improved Interface for HKMG Technology

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Bibliographic Details
Published in:IEEE transactions on electron devices 2024-01, Vol.71 (1), p.746-751
Main Authors: Wei, Yanzhao, Yao, Jiaxin, Zhang, Qingzhu, Sang, Guanqiao, Bao, Yunjiao, Gao, Jianfeng, Li, Junfeng, Luo, Jun, Yin, Huaxiang
Format: Article
Language:English
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ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2023.3335900