A Sc 0.096 Al 0.904 N-Based Bimorph Piezoelectric MEMS Microphone Using 3 × 3 Circular Diaphragms

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Bibliographic Details
Published in:IEEE transactions on electron devices 2024-05, Vol.71 (5), p.3162-3168
Main Authors: Hu, Bohao, Liu, Wenjuan, Liu, Yan, Yang, Chaoxiang, Wang, Zekai, Lu, Liangyu, Cai, Yao, Guo, Shishang, Sun, Chengliang
Format: Article
Language:English
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ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2024.3376320