Backside Thermal Fault Localization Using Laser Scanning Confocal Thermoreflectance Microscopy Based on Auto-Balanced Detection

In this paper, we propose a sensitivity-enhanced thermoreflectance microscopy (TRM) system employing an electronic auto-balancing photoreceiver for effective thermal fault localization through a Si substrate. The proposed system in the auto-balanced detection not only improves the system signal-to-n...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2020-06, Vol.69 (6), p.2914-2923
Main Authors: Kim, Dong Uk, Kim, Jung Dae, Han, Ilkyu, Jeong, Chan Bae, Lee, Kye-Sung, Hur, Hwan, Nam, Ki-Hwan, Bae, Ji Yong, Kim, I Jong, Chang, Ki Soo
Format: Article
Language:English
Subjects:
Auto-balanced detection
Circuit faults
confocal microscopy
fault localization
Fault location
Image detection
Imaging
Laser beams
Localization
Measurement by laser beam
Microscopy
reflection
Sensitivity enhancement
Signal to noise ratio
Silicon
Silicon substrates
Substrates
thermal imaging
Transmission line measurements
Zooming
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Summary:In this paper, we propose a sensitivity-enhanced thermoreflectance microscopy (TRM) system employing an electronic auto-balancing photoreceiver for effective thermal fault localization through a Si substrate. The proposed system in the auto-balanced detection not only improves the system signal-to-noise ratio (SNR) by approximately five times compared to that achievable via normal detection but also mitigates the inherent system noise, such as pseudothermoreflectance signals, by using the optical zooming. Moreover, temperature variations as small as ~47 mK were detectable under the measurement conditions employed in this paper. Finally, we experimentally demonstrated clear localization of a thermal fault, which was dimly visible in the normal backside detection results, in an optical zoomed thermal image.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2019.2925248