Model-Based RF Sensing for Contactless High-Resolution Voltage Measurements

The development of highly integrated microwave devices greatly benefits from precise knowledge of internal device voltages. Contact-based probing techniques can only provide external measurements and are limited by the size of the necessary contact pads. The contactless voltage sensing method presen...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2023, Vol.72, p.1-8
Main Authors: Poik, Mathias, Hackl, Thomas, Martino, Stefano Di, Schober, Martin, Dang, Jin, Schitter, Georg
Format: Article
Language:English
Subjects:
Capacitance
Contactless
Crosstalk
Electrical measurement
High resolution
Microwave measurement
passive voltage probe
Probes
Radio frequency
radio frequency (RF)
Spatial resolution
Transmission line measurements
Voltage measurement
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Summary:The development of highly integrated microwave devices greatly benefits from precise knowledge of internal device voltages. Contact-based probing techniques can only provide external measurements and are limited by the size of the necessary contact pads. The contactless voltage sensing method presented in this article enables measurements of radio frequency (RF) voltages within microwave devices. By using a conductive cantilever probe with a sharp tip as capacitively coupled sensor, measurements can be performed at precisely known tip-surface distances. In combination with the proposed model-based crosstalk compensation method, this enables measurements at high spatial resolution. The RF sensing system is implemented and experimentally verified. Voltages at frequencies up to 13 GHz on 2- \mu \text{m} -sized structures are measured while improving the measurement sensitivity by a factor of 4.9 with respect to conventional contactless sensing techniques.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2023.3317385