Robust Control of a MEMS Probing Device

In this paper, a systematic design based on the robust control theory is developed for a microelectromechanical systems nanopositioning/probing device. The device is fabricated on a silicon-on-insulator substrate, and provides decoupled XY motion by using a parallel kinematics mechanism design. Each...

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2014-02, Vol.19 (1), p.100-108
Main Authors: Xuemeng Zhang, Bonjin Koo, Salapaka, Srinivasa M., Jingyan Dong, Ferreira, Placid M.
Format: Article
Language:English
Subjects:
Bandwidth
Capacitance
Control design
Design engineering
Detection
Devices
Electrostatic comb drive
H_\infty control
Mathematical model
Mechatronics
Microelectromechanical systems
microelectromechanical systems (MEMSs)
Micromechanical devices
nanopositioning
Nanostructure
Nonlinear dynamics
Robust control
Sensors
system identification
Transfer functions
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Summary:In this paper, a systematic design based on the robust control theory is developed for a microelectromechanical systems nanopositioning/probing device. The device is fabricated on a silicon-on-insulator substrate, and provides decoupled XY motion by using a parallel kinematics mechanism design. Each axis of the device is actuated by linear comb-drives and the corresponding displacements are sensed by separate comb structures. To improve the sensing resolution, the sensing and driving combs are electrically isolated. The nonlinear dynamic model between the actuation voltage and the sensed displacement will increase the complexity of model identification and control design. We circumvent the nonlinear model by redefining the input and output (I/O) signals during the model definition and identification, which results in linear and time-invariant models. A dynamical model of the system is identified through experimental input-output frequency-domain identification. The implemented H ∞ control design achieves a significant improvement over the response speed, where the bandwidths from the closed-loop sensitivity and complementary sensitivity functions, respectively, are 68 and 74 Hz. When compared to open-loop characteristics, enhancement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation (by over 12%) is demonstrated through this design.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2012.2224122