A 12-18-GHz three-pole RF MEMS tunable filter

This paper presents a state-of-the-art RF microelectromechanical systems (MEMS) wide-band tunable filter designed for the 12-18-GHz frequency range. The coplanar-waveguide filter, fabricated on a glass substrate using loaded resonators with RF MEMS capacitive switches, results in a tuning range of 4...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2005-08, Vol.53 (8), p.2566-2571
Main Authors: Entesari, K., Rebeiz, G.M.
Format: Article
Language:English
Subjects:
Applied sciences
Bandwidth
Bias
Circuit properties
Coplanar-waveguide (CPW) filter
Deltas
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Frequency
Frequency filters
Glass
Insertion loss
loaded resonators
Micro- and nanoelectromechanical devices (mems/nems)
Microelectromechanical systems
microelectromechanical systems (MEMS)
Micromechanical devices
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Microwaves
Noise levels
Oscillators, resonators, synthetizers
Radio frequencies
Radiofrequency microelectromechanical systems
Resonator filters
RF MEMS
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Switches
Tunable filters
Tuning
wide-band tunable filter
Wideband
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Description
Summary:This paper presents a state-of-the-art RF microelectromechanical systems (MEMS) wide-band tunable filter designed for the 12-18-GHz frequency range. The coplanar-waveguide filter, fabricated on a glass substrate using loaded resonators with RF MEMS capacitive switches, results in a tuning range of 40% with very fine resolution, and return loss better than 10 dB for the whole tuning range. The relative bandwidth of the filter is 5.7/spl plusmn/0.4% over the tuning range and the size of the filter is 8 mm/spl times/4 mm. The insertion loss is 5.5 and 8.2 dB at 17.8 and 12.2 GHz, respectively, for a 2-k/spl Omega//sq bias line. The loss improves to 4.5 and 6.8 dB at 17.8 and 12.2 GHz, respectively, if the bias line resistance is increased to 20 k/spl Omega//sq. The measured IIP/sub 3/ level is >37 dBm for /spl Delta/f>200 kHz. To our knowledge, this is the widest band planar tunable filter to date.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2005.852761