Compact RF Model for Transient Characteristics of MEMS Capacitive Switches

A compact model is proposed to facilitate the design and simulation of the control waveform of RF microelectromechanical systems (MEMS) capacitive switches with electrostatically actuated membranes. Following conventional approaches, the pull-in motion of a membrane is simulated by an L-R-C network....

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2009-01, Vol.57 (1), p.237-242
Main Authors: Halder, S., Palego, C., Zhen Peng, Hwang, J.C.M., Forehand, D.I., Goldsmith, C.L.
Format: Article
Language:English
Subjects:
Applied sciences
Biomembranes
Capacitance measurement
Capacitors
Circuit design
Circuit properties
Circuit simulation
Computational modeling
Computer simulation
Contact
Dielectric, amorphous and glass solid devices
Diodes
Electric, optical and optoelectronic circuits
Electrodes
electromechanical effects
Electronics
Exact sciences and technology
Membranes
Micro- and nanoelectromechanical devices (mems/nems)
microelectromechanical devices
Microelectromechanical systems
Micromechanical devices
Microwave and submillimeter wave devices, electron transfer devices
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
microwave devices
microwave measurements
microwave switches
Radio frequencies
Radio frequency
Radiofrequency microelectromechanical systems
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Switches
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Description
Summary:A compact model is proposed to facilitate the design and simulation of the control waveform of RF microelectromechanical systems (MEMS) capacitive switches with electrostatically actuated membranes. Following conventional approaches, the pull-in motion of a membrane is simulated by an L-R-C network. However, the present model deviates from conventional approaches by adding another capacitor and a diode to simulate the gradual contact of the membrane with the stationary electrode. After contact, variable mass, spring constant, and damping factor are used to simulate the release process of the membrane. By smoothly bridging the model between pull-in, contact, and release processes, the model can efficiently simulate static and transient S-parameters of the switches up to 50 GHz. The model can be readily installed in popular computer-aided circuit design environments to analyze in the time domain the behavior of the switches and the operation of MEMS-based circuits.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2008.2009039