Parasitic Parameter Extraction for Calibration Standards Using an Optimization Strategy

This article presents a novel extraction method for parasitic parameters of on-wafer calibration standards using an optimization strategy. Based on the physical models of the calibration standards, the parasitic parameters of all calibration standards can be extracted using the Bayesian optimization...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2023-04, Vol.71 (4), p.1612-1620
Main Authors: Zhou, Jiefeng, Zhang, Ling, Chen, Junhui, Jiang, Li, Li, Da, Li, Yan, Chen, Hongsheng, Li, Er-Ping
Format: Article
Language:English
Subjects:
Bayesian optimization
Calibration
calibration standards
crosstalk
Impedance
Load modeling
Optimization
Parameters
parasitic parameters
Power transmission lines
Scattering parameters
Transmission line measurements
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Summary:This article presents a novel extraction method for parasitic parameters of on-wafer calibration standards using an optimization strategy. Based on the physical models of the calibration standards, the parasitic parameters of all calibration standards can be extracted using the Bayesian optimization method with a fast calculation speed and high accuracy. Compared with the conventional thru-reflect-line (TRL) extraction method, the proposed approach can work well in systems with high crosstalk. The methodology is validated through on-wafer measurements using a ground-signal-ground (GSG) probe with low crosstalk and a ground-signal (GS) probe with high crosstalk. The proposed method shows a comparable accuracy with the TRL method in the low-crosstalk case, while it has higher accuracy in the high-crosstalk scenario.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2022.3221951