Non-quasi-static small-signal modeling and analytical parameter extraction of SOI FinFETs

Accurate modeling and analytical parameter extraction of the non-quasi-static small-signal model of FinFETs are presented using a three-dimensional device simulator. Using simple Y- and Z-matrices calculations, the extrinsic gate-to-drain/source capacitance and source/drain resistance are de-embedde...

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Bibliographic Details
Published in:IEEE transactions on nanotechnology 2006-05, Vol.5 (3), p.205-210
Main Authors: IN MAN KANG, SHIN, Hyungcheol
Format: Article
Language:English
Subjects:
Analytical models
Applied sciences
Capacitance
Circuit simulation
CMOS RF modeling
Data mining
Design. Technologies. Operation analysis. Testing
Drains
Electronics
Equivalent circuits
Exact sciences and technology
Extraction
FinFETs
Integrated circuit modeling
Integrated circuits
Mathematical analysis
Mathematical models
MOSFETs
Optimization
Parameter extraction
Performance analysis
Saturation
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
small-signal model
SOI FinFET
Transistors
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Summary:Accurate modeling and analytical parameter extraction of the non-quasi-static small-signal model of FinFETs are presented using a three-dimensional device simulator. Using simple Y- and Z-matrices calculations, the extrinsic gate-to-drain/source capacitance and source/drain resistance are de-embedded from the small-signal equivalent circuit. The analytical parameter extractions are performed by Y-parameter analysis after removing the extrinsic gate-to-drain/source capacitance and source/drain resistance. Accuracy of the model and extraction method is verified with the device-simulation data up to 700 GHz. Without any complex fitting and optimization steps, the total modeling rms error of the Y-parameter up to 700 GHz was calculated to be only 1.9 % in the saturation region and 2.1 % in the linear region. Also, the bias dependencies of the small-signal parameters are presented.
ISSN:1536-125X
1941-0085
DOI:10.1109/TNANO.2006.869946