Vacuum Deposition Techniques in an Engineering Laboratory Facility for Producing Thin Film Integrated Circuits

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Bibliographic Details
Published in:IEEE transactions on product engineering and production 1963-07, Vol.7 (3), p.40-47
Main Author: Kraus, R.
Format: Article
Language:English
Subjects:
Capacitors
Laboratories
Resistors
Sputtering
Substrates
Temperature control
Thickness control
Thin film circuits
Vacuum technology
Voltage-controlled oscillators
Online Access:Get full text
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ISSN:0097-4544
1558-2450
DOI:10.1109/TPEP.1963.1136403