Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios

Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2014-10, Vol.42 (10), p.2518-2519
Main Authors: Baranov, Oleg, Xiaoxia Zhong, Jinghua Fang, Kumar, Shailesh, Shuyan Xu, Cvelbar, Uroš, Mariotti, Davide, Ostrikov, Kostya
Format: Article
Language:English
Subjects:
Arc discharge
Discharges (electric)
Electron traps
ion beam
Ion beams
Magnetic domains
Magnetic flux
magnetic traps
Plasmas
Substrates
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Summary:Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2013.2295626