Design and Implementation of RF Resonant Inverter With Matching Circuit to Generate Plasma for Possible Endoscopy Sterilization

This research focuses on the design and implementation of an RF resonant inverter with a matching circuit to generate plasma for possible endoscopy sterilization. The circuit topology is a half-bridge inverter with the operating frequency of 13.56 MHz. The soft switching is achieved by the matching...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2023-04, Vol.51 (4), p.1-7
Main Authors: Wu, Tsai-Fu, Duan, Xi-Ming, Wu, Chi-Pin, Hsu, Wei-Che
Format: Article
Language:English
Subjects:
Chambers
Circuit design
Circuits
Design
Electric bridges
Endoscopy
Gallium nitride (GaN)
Impedance
Impedance measurement
Inverters
Matching
plasma applications
Plasmas
Power amplifiers
Radio frequency
Resonant inverters
RLC circuits
Smith chart
Sterilization
switched circuits
Switching
Topology
Voltage measurement
zero voltage switching (ZVS)
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Summary:This research focuses on the design and implementation of an RF resonant inverter with a matching circuit to generate plasma for possible endoscopy sterilization. The circuit topology is a half-bridge inverter with the operating frequency of 13.56 MHz. The soft switching is achieved by the matching circuits and resonant network to reduce switching loss. Conventionally, an RF power amplifier associated with an automatching circuit is used to match the chamber to 50 \Omega , which will be presented in detail as a reference. Alternatively, the half-bridge inverter is designed to identify the chamber impedance, and therefore, the CLCL matching circuits can be designed to match the chamber. The matching circuits were designed based on chamber-impedance measurement to obtain the first point, and through Smith Chart, one can reach the destination, 50 \Omega , point by point to determine a set of CLCL component values. The overall system is verified with a 300-W half-bridge inverter using GaN MOSFET switching elements.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2023.3252087