Integrated signal conditioning for silicon pressure sensors

A silicon-diaphragm pressure sensor containing on-chip circuitry for signal conditioning has been designed for applications in biomedicine. The device requires no off-chip components and only two external leads, making it suitable for use with multisensor catheters having diameters less than 1.5 mm....

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Bibliographic Details
Published in:IEEE transactions on electron devices 1979-12, Vol.26 (12), p.1906-1910
Main Authors: Borky, J.M., Wise, K.D.
Format: Article
Language:English
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Summary:A silicon-diaphragm pressure sensor containing on-chip circuitry for signal conditioning has been designed for applications in biomedicine. The device requires no off-chip components and only two external leads, making it suitable for use with multisensor catheters having diameters less than 1.5 mm. The output is a temperature-compensated high-frequency FM analog representation of the applied pressure signal. The device exhibits 1-percent resolution and accuracy over the physiological pressure and temperature ranges. Circuit techniques applicable to a variety of active sensors are descried.
ISSN:0018-9383
1557-9646
DOI:10.1109/T-ED.1979.19794