IVB-8 microscopic redistribution of oxygen in silicon

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Bibliographic Details
Published in:IEEE transactions on electron devices 1981-10, Vol.28 (10), p.1241-1242
Main Authors: Evans, C.A., Furman, B.K., Magee, T.J.
Format: Article
Language:English
Subjects:
Arsenic
Electrons
III-V semiconductor materials
Indium phosphide
Ions
MISFETs
Silicon
Online Access:Get full text
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ISSN:0018-9383
1557-9646
DOI:10.1109/T-ED.1981.20565