Optical properties of oxygen-ion-implanted benzocyclobutene films

Alteration of the refractive index of benzocyclobutene film by oxygen-ion implantation has been investigated. An increase in the refractive index of 3.8% was observed with an oxygen ion dose of 3×10 14   cm −2 . The optical loss of the ion-implanted region was measured using both surface planar wave...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2001-05, Vol.19 (3), p.883-886
Main Authors: Mada, Yoichi, Sugitani, Suehiro, Arai, Kunihiro, Yamasaki, Kimiyoshi
Format: Article
Language:English
Subjects:
Annealing
Binding energy
Ion implantation
Optical waveguides
Oxidation
Refractive index
Thermodynamic stability
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Summary:Alteration of the refractive index of benzocyclobutene film by oxygen-ion implantation has been investigated. An increase in the refractive index of 3.8% was observed with an oxygen ion dose of 3×10 14   cm −2 . The optical loss of the ion-implanted region was measured using both surface planar waveguides and channel ones. With the latter structure, a 2.3 dB/cm propagation loss was obtained with an oxygen-ion dose of 10 14   cm −2 . The refractive index increase and the optical loss were stable against heat treatments. It was deduced that the refractive-index increase can be attributed to compression of the film and additionally to oxidation of the film.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.1362677