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HfO2–SiO2 interface in PVD coatings

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2001-09, Vol.19 (5), p.2267-2271
Main Authors: Cosnier, V., Olivier, M., Théret, G., André, B.
Format: Article
Language:English
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ISSN:0734-2101
1520-8559
DOI:10.1116/1.1382879