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Growth and structure of hyperthin SiO2 coatings on polymers

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Bibliographic Details
Published in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2001-09, Vol.19 (5), p.2320-2327
Main Authors:	Dennler, G., Houdayer, A., Ségui, Y., Wertheimer, M. R.
Format:	Article
Language:	English
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Online Access:	Get full text
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