Scanning capacitance microscopy measurements using diamond-coated probes

• Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2002-05, Vol.20 (3), p.783-786
• Main Authors: Yabuhara, Hidehiko, Ciappa, Mauro, Fichtner, Wolfgang
• Format: Article
• Language: English
• Subjects: Computer simulation; Metallizing; Oxidation; Secondary ion mass spectrometry; Semiconducting diamonds; Semiconductor devices; Semiconductor doping; Sensors; Stress analysis; Tribology
• ISSN: 0734-211X; 1071-1023; 1520-8567
• DOI: 10.1116/1.1467660

Diamond-coated cantilevers have been used for scanning capacitance microscopy (SCM) as an alternative for metal-coated cantilevers in order to improve the stability of probes. It is shown that the diamond-coated probes produce adequate intensity of dC signal and high contrast for both p-type and n-type silicon samples and also provide superior endurance characteristics to metal-coated probes. Due to the robustness of the diamond-coated probes, we are able to evaluate the reproducibility of measurements and the homogeneity of the ultrathin oxide for both dry oxidation (heated up to 300 ° C in air under ultraviolet illumination) and wet oxidation (immersed into a hydrogen peroxide solution at 70 ° C ). The dry oxidation shows better reproducibility, while the wet oxidation shows better homogeneity. Finally, comparison of SCM with secondary ion mass spectrometry measurement shows that diamond-coated probes can be used at least for one-dimensional quantitative SCM measurements without any significant effect of depletion in the diamond-coated tip itself.