Dramatic change of electrical properties in La–Ba–Mn–O thin films prepared using bias sputtering

Polycrystalline La–Ba–Mn–O thin films have been grown using rf magnetron sputtering on Si(100) substrates from a stoichiometric La 0.7 Ba 0.3 MnO 3 target. Four films were grown with substrate biased such as −5, −10, −15, and −25 V and compared with the film grown with grounded substrate. Bias effec...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2002-11, Vol.20 (6), p.2115-2118
Main Authors: Lee, Jong Cheol, Ie, Sang Yub, Park, Seung Iel, Yi, Yeonjin, Jang, Gyu In, Song, Ho Shik, You, Dong Gyun, Jeong, Kwangho
Format: Article
Language:English
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Summary:Polycrystalline La–Ba–Mn–O thin films have been grown using rf magnetron sputtering on Si(100) substrates from a stoichiometric La 0.7 Ba 0.3 MnO 3 target. Four films were grown with substrate biased such as −5, −10, −15, and −25 V and compared with the film grown with grounded substrate. Bias effects on the stoichiometry and physical properties of the films are studied. The dc resistivity was measured in the temperature range from 85 to 300 K for the films with substrate bias of 0, −5, −10, −15, and −25 V. The magnetoresistance was measured in the magnetic field of 0–10 000 Oe and at 77 K. The film with grounded substrate showed semiconductor behavior (dρ/dT
ISSN:0734-2101
1520-8559
DOI:10.1116/1.1519866