Analytical study on small contact hole process for sub-65nm node generation

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Bibliographic Details
Published in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2004-11, Vol.22 (6), p.L38-L43
Main Authors: Kim, Hyun-Woo, Yoon, Jin-Young, Hah, Jung-Hwan, Woo, Sang-Gyun, Cho, Han-Ku, Moon, Joo-Tae
Format: Article
Language:English
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ISSN:1071-1023
1520-8567
DOI:10.1116/1.1815315